Vacuum Rodless Cylinder CYV Series
Product Description
A low-dust-generation type air cylinder, usable for transport in vacuum environments.
[Features]
· Being able to be placed in a vacuum chamber helps contribute to making more compact and simplified transport systems.
· Stainless steel linear guide and low-dust-generation vacuum grease.
· Reduced initial dust generation for reduced dust generated at the stroke end.
· Uses a magnetic rodless cylinder which has no sliding-induced external leaks.
· Outgassing has been reduced by surface treatments and the plastic/resin materials eliminated.
· Tube internal diameter: 15 mm, Magnetic attractive force: 59 N. Piping connection port diameter: 5/16-24 UNF.
· Tube internal diameter: 32 mm, Magnetic attractive force: 268 N. Piping connection port diameter: 7/16-20 UNF.
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Vacuum Rodless Cylinder CYV Series Specifications
Vacuum Rodless Cylinder CYV Series external appearance
Vacuum Rodless Cylinder CYV Series example application
*The concept drawing above is an example showing how to install the cylinder. However, it is not to fulfill all the vacuum-chamber usage conditions.
Specifications
- Operating environment pressure: atmospheric to 1.3 × 10-4 Pa (ABS)
- Operating environment atmosphere (*1): air and inert gases
- Operating fluid (*1): air and inert gases
- Operation type: double action
- Guaranteed proof pressure: 0.5 MPa
- Operating pressure range: 0.05 to 0.3 MPa
- Leak amount: 1.3 × 10-7 Pa·m3/sec or less (at normal temperature, excluding gas permeation)
- Maximum baking temperature (*2, *3): 100°C
- Ambient and operating fluid temperature: -10 to +60°C (no freezing)
- Maximum operating piston speed (*4): 50 to 300 mm/s
- Stroke adjustable amount: Each side -2 to 0 mm (both sides -4 to 0 mm)
- Cushioning: sine cushion (air cushioning)
- Lubrication method: vacuum grease for linear guide and in cylinder tube
- *1 Air is recommended for the operating environment atmosphere and operating liquid. If using other inert gases, the product lifespan and other variables may vary. Contact the SMC support center for details.
- *2 This baking is limited to baking before cylinder operation. For cylinder operation, use a temperature range of -10 to +60°C.
- *3 Contact the SMC support center if the baking temperature is to exceed 100°C.
- *4 The operating piston speed above indicates the maximum speed. From the beginning of slide table movement at the stroke end until the end of the cushion stroke takes approx. 0.5 seconds (one side) or 1 second for both sides.
Weight List
CYV15 Standard Stroke
- 100 mm: 1.2 kg
- 150 mm: 1.4 kg
- 200 mm: 1.6 kg
- 250 mm: 1.7 kg
- 300 mm: 1.9 kg
- 350 mm: 2 kg
- 400 mm: 2.2 kg
- 450 mm: 2.4 kg
- 500 mm: 2.5 kg
- 600 mm: 2.8 kg
- 700 mm: 3.2 kg
CYV32 Standard Stroke
- 100 mm: 4.2 kg
- 150 mm: 4.6 kg
- 200 mm: 5 kg
- 250 mm: 5.5 kg
- 300 mm: 5.9 kg
- 350 mm: 6.3 kg
- 400 mm: 6.7 kg
- 450 mm: 7.1 kg
- 500 mm: 7.5 kg
- 600 mm: 8.3 kg
- 700 mm: 9.1 kg
Theoretical Output List
Tube Inner Diameter: 15 mm, Piston Area: 176 mm2 Theoretical Output
- Operating pressure 0.1 MPa: 18 N
- Operating pressure 0.2 MPa: 35 N
- Operating pressure 0.3 MPa: 53 N
Tube Inner Diameter: 32 mm, Piston Area: 804 mm2 Theoretical Output
- Operating pressure 0.1 MPa: 80 N
- Operating pressure 0.2 MPa: 161 N
- Operating pressure 0.3 MPa: 241 N
Product Features
Its non-contact structure ensures no contact between the outer surface of the cylinder tube and the inner surface of the slide table, eliminating the generation of dust caused by sliding friction
Special cylinder tube, long stroke (max 700 mm)
Uses a special cylinder tube made of extruded aluminum
As the cylinder is directly attached to the rail base, there is no deflection, even with long strokes. The use of a linear guide ensures this non-contact structure
O-ring seals separate the vacuum and atmosphere
*To allow fine adjustments to be made to the stroke, O-rings are installed to separate the vacuum from the atmosphere. Contact SMC if you require a different sealing method.
Can be fine-tuned at the end of the stroke
Fine adjustments can be made on one side (-2 to 0 mm) or both sides together (-4 to 0 mm)
Product Drawing
(Unit: mm)
Vacuum Rodless Cylinder CYV Series dimensional drawing
| Model | A | B | C | E | ED | EK | F | G | H | HA | HI | HL | HP | J | JK | K | L | LD |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| CYV15 | 8 | 10.5 | 6.4 | 6H9 (0 to +0.030) | 9.5 | 4 | 12.5 | 10 | 45 | 23 | 23 | 37.6 | 44 | M6 × 1 | 10 | 21 | 67 | 5.6 |
| CYV32 | 12 | 16 | 10.2 | 4H9 (0 to +0.030) | 13 | 6 | 25 | 9 | 75 | 39 | 39 | 63.3 | 73.5 | M10 × 1.5 | 12 | 20 | 90 | 9.2 |
| Model | LW | MM | M | N | P | PA | PB | PC | Q | QW | R | T | TA | TB | TC | W | Y | Z |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| CYV15 | 69 | M4 × 0.7 | 6 | 4.5 | 5/16-24UNF | 25 | 60 | 10 | 112 | 48 | 45 | 30 | 20 | 15 | 0.5 | 69 | 2.5 | 132 |
| CYV32 | 115 | M6 × 1 | 8 | 7.5 | 7/16-20UNF | 50 | 100 | 12 | 147 | 83 | 79.5 | 34 | 22.5 | 20 | 0.5 | 115 | 3.5 | 165 |
*See the individual product notes in the SMC catalog (cushioning effect [sine cushion] and stroke adjustment).
Product Structural Drawing
CYV15 structural drawing
CYV32 structural drawing
| Number | Part Name | Material | Note |
|---|---|---|---|
| 1 | Magnet A | – | – |
| 2 | Piston-Side Yoke | Rolled steel plate | Zinc chromate |
| 3 | Piston | Brass / aluminum alloy | Electroless nickel plating / chromate |
| 4 | Piston Seal | Fluororubber | – |
| 5 | Wear Ring | Special bearing | – |
| 6 | Shaft | Stainless steel | – |
| 7 | Cushion Ring | Stainless steel / brass | – / electroless nickel plating |
| 8 | Magnet B | – | Titanium nitride coating |
| 9 | External Slider Side Yoke | Rolled steel | Electroless nickel plating |
| 10 | Hold Spacer | Aluminum alloy | Electroless nickel plating |
| 11 | Slide Table | Aluminum alloy | Electroless nickel plating |
| 12 | Insertion Guide Plate | Stainless steel | – |
| 13 | Cross-Head Pan Head Screw | Stainless steel | – |
| 14 | Side Plate A | Aluminum alloy | Electroless nickel plating |
| 15 | Side Plate B | Aluminum alloy | Electroless nickel plating |
| 16 | Hexagon Socket Head Bolt | Stainless steel | – |
| 17 | Spring Washer | Stainless steel | – |
| 18 | Flat Washer | Stainless steel | – |
| 19 | Plate A | Aluminum alloy | Electroless nickel plating |
| 20 | Plate B | Aluminum alloy | Electroless nickel plating |
| 21 | Cushion Seal | Fluororubber | – |
| 22 | Inner Cover | Aluminum alloy | Electroless nickel plating |
| 23 | Cylinder Tube Gasket | Fluororubber | – |
| 24 | O-ring | Fluororubber | – |
| 25 | O-ring | Fluororubber | – |
| 26 | Hex Socket Head Set Screw | Stainless steel | – |
| 27 | Hexagon Socket Head Bolt | Stainless steel | – |
| 28 | Flat Washer | Stainless steel | – |
| 29 | Cross-Head Pan Head Screw | Stainless steel | – |
| 30 | Hexagon Socket Head Bolt | Stainless steel | – |
| 31 | Rail base | Aluminum alloy | Electroless nickel plating |
| 32 | Cylinder Tube | Aluminum alloy | Electroless nickel plating |
| 33 | Tube Attaching Bracket | Aluminum alloy | Electroless nickel plating |
| 34 | Hexagon Socket Head Bolt | Stainless steel | – |
| 35 | Flat Washer | Stainless steel | – |
| 36 | Hexagon Socket Head Bolt | Stainless steel | – |
| 37 | Flat Washer | Stainless steel | – |
| 38 | Top Cover | Aluminum alloy | Electroless nickel plating |
| 39 | Cushion Seal Holder | Aluminum alloy | Chromate |
| 40 | O-ring | Fluororubber | – |
| 41 | O-ring | Fluororubber | – |
| 42 | Linear Guide | Stainless steel | – |
| 43 | Holding Plate | Aluminum alloy | Hard anodized aluminum |
- *In the Materials and Notes columns of the list above, the first description is for CYV15, and the second description is for CYV32.
Precautions
- *Open the inner package of the double packaged clean series in a clean room or other clean environment.
- *Do not use bare hands to install the cylinder. Doing so can cause the outgassing characteristics to degrade.
- *Fully exhaust the compressed air in the piping outside of the clean room before replacing parts in the chamber or disassembling.
- *See the SMC catalog for product information other than that detailed above.
Basic Information
| Type | Rodless Cylinder | Table Material | Aluminum Alloy | Rodless Cylinder Joint Type | Magnetic |
|---|---|---|---|---|---|
| Environment | Vacuum | Table Surface Treatment | Electroless Nickel Plating | Guide Type | Linear guide type |
| Operating Speed(mm/s) | 50::300 | Operating Pressure(MPa) | 0.05 to 0.3 | Cushion | Sine cushion (air cushion) |
