Features and Structure of the Vacuum Type Motor

• To reduce gas emissions, the motor case is made of aluminum and stainless steel, and the surface is not painted. In addition, vacuum grease is also used for the bearings.
• There is no need to worry about contaminating the vacuum environment, as the emitted gases are the same components found in a normal, clean environment.
• Heat-resistant winding is used to withstand the temperature of the baking process.

Advantages of Vacuum Type Motors

Miniaturizing Equipment and Increasing Design Flexibility

When a motor is installed in the air, the equipment becomes large due to the use of a rotating induction machine. The vacuum type allows the motor to be installed in a vacuum environment, meaning the equipment can be miniaturized. In addition, the αSTEP AR Series eliminates the need for a sensor for position confirmation, which contributes to cost reduction.

With the αSTEP AR Series, Position Monitoring Without an Encoder is Possible

The αSTEP AR Series monitors motor information through closed loop control and is equipped with various alarm output functions. Expensive vacuum-compatible encoders are no longer needed.

Equipped with a rotor position detection sensor (resolver) to detect motor information and control the motor.

Realization of Various Movements in a Vacuum

They are used in various applications, including semiconductor manufacturing equipment and measuring instruments such as electron microscopes.

Vacuum type motors can be used for multi-axis stages in a vacuum environment, which is difficult to design with rotating induction machines. Multiple axes can be combined in a vacuum to achieve more complex movements.

The Low-Loss αSTEP AR Series is Ideal for Analysis and Processing Applications in a Vacuum

It is useful for positioning applications in vacuum environments, such as material analysis in low vacuum, high power laser processing, and vacuum deposition.

Helping to Maintain the Quality of Vacuum Environments

Designed to Reduce Gas Emissions

To reduce the gas emissions, the surface of the motor is not painted, and vacuum grease is used for the bearings. The main residual gases will be the same as those found in a normal, clean environment, so there is no need to worry about contamination of the vacuum chamber.

Maintain the Vacuum Pressure by Suppressing Temperature Rise

Normally, as the motor current value increases, the vacuum pressure increases. This is due to the increase in motor temperature and increased evaporation of water, mainly from the windings and resin material. To keep the vacuum pressure low, it is important to keep the motor temperature low.

The αSTEP AR Series has a function to adjust the motor current according to the magnitude of the load torque (CC mode). When used in CC mode, both the motor temperature and vacuum pressure can be kept low.

The figure below shows the rotation speed – temperature characteristics during continuous operation and duty cycle operation (intermittent operation).

• Even during continuous operation when the temperature tends to be high, if the operating speed is 900 r/min max., the outer coating temperature will not exceed 100 °C.
• The external surface temperature during 500 r/min duty cycle operation is 46 °C in CC mode and 80 °C in normal mode, as compared to each mode. The temperature is 34 °C lower in CC mode.

Product Line

Power Supply Input	Series Name	Basic Step Angle [°]	Vacuum Degree [Pa]	Frame Size [mm]				Mass [kg]	List Price
				28	42	60	85
AC		0.36	10-5	–	●	●	●	0.47~1.9	167,300 JPY~ (Motor, driver)
DC				●	●	●	●	0.2~3
DC		0.72	10-4	–	●	●	–	0.21~1.3	114,400 JPY~ (Motor, driver)
			10-5	●	–	–	–	0.11~0.2

For more details, please contact your nearest branch or sales office, or Customer Support Center.

Technical Reference

The RENGA Technical Report provides detailed information materials on vacuum motors.