Clean Gas Filter: Disposable Type / Multiple Disc Type, SFC100 Series – Bộ lọc khí SMC
Product Description
– Bộ lọc khí SMC
Highly reliable fluoropolymer membrane clean gas filter.
[Features]
·Element cannot be replaced
·Precision filtration of compressed air and nitrogen for semiconductor processes
·Filtration degree 0.01 µm (filtration efficiency 99.99%)
·Disposable type, multiple disc type
·Connection method: Rc, TSJ, URJ
·Nominal pipe thread size: 1/4, 3/8
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Clean Gas Filter: Disposable Type / Multiple Disc Type, SFC100 Series Specifications – Bộ lọc khí SMC
Disposable Type / Multiple Disc Type, SFC100 Series external appearance
SFC10□ flow rate characteristics graph
Fluid: Compressed air / Inlet temperature: 20°C
| Applicable Fluid | Air, nitrogen | |
|---|---|---|
| Operating Pressure*1 | MAX. 0.99 MPa, Vacuum 1.3 × 10-6 kPa | |
| Operating Temperature | 5 to 120℃ | |
| Element Proof Differential Pressure | MAX. 0.42 MPa | |
| Element Reverse Differential Pressure | MAX. 0.07 MPa | |
| Filtration*2 | 0.01 μm (filtration efficiency 99.99%) | |
| Helium Leak Volume | 4.0 × 10-9 Pa･m3/sec or less | |
| Main Material | Case | SUS316 (Interior/Exterior: Electrolytic polishing) |
| Filtration Medium | PTFE membrane | |
| Seal | PTFE | |
*1: The maximum operating pressure is 0.99 MPa since this product does not conform to the High Pressure Gas Safety Law (Japan). Ensure that, if 0.1 MPa is exceeded, there is no pressure fluctuation during use.
*2: Measured under manufacturer’s specified conditions.
Model
| Model | Rated Flow L/min (ANR)* | Connection | Filtration Area cm2 | Weight (kg) |
|---|---|---|---|---|
| SFC100-02 | 240 | Rc 1/4 (female thread) | 300 | 0.35 |
| SFC100-03 | Rc 3/8 (female thread) | 0.36 | ||
| SFC102-02 | TSJ 1/4 | 0.40 | ||
| SFC102-03 | TSJ3/8 | 0.41 | ||
| SFC105-02 | URJ 1/4 | 0.44 | ||
| SFC105-03 | URJ3/8 | 0.49 |
*At inlet pressure of 0.7 MPa and pressure drop of 0.02 MPa.
Product Diagram
Disposable Type / Multiple Disc Type, SFC100 Series diagram
| Number | Part name | Material | Note |
|---|---|---|---|
| 1 | Case 1 | SUS 316 | Electrolytic polishing (interior/exterior) |
| 2 | Case 2 | ||
| 3 | Element | PTFE, PVDF | – |
| 4 | O-ring | PTFE | – |
| 5 | Spacer | PVDF | – |
Product Outline Dimensional Drawing
(Unit: mm)
SFC100-02/SFC100-03 dimensional drawing
- SFC100-02: A / Rc 1/4
- SFC100-03: A / Rc 3/8
(Unit: mm)
SFC102-02/SFC102-03 dimensional drawing
- SFC102-02: A / TSJ 1/4 (Tube Swage Joint)
- SFC102-03: A / TSJ 3/8 (Tube Swage Joint)
(Unit: mm)
SFC105-02/SFC105-03 dimensional drawing
- SFC105-02: A / URJ 1/4 (Union Ring Joint), B / 22 mm, C / 19 mm
- SFC105-03: A / URJ 3/8 (Union Ring Joint), B / 26.5 mm, C / 22 mm
Precautions
- *Ensure that you read the specific product precautions prior to use.
- *Confirm the specifications. The Clean Gas Filter is designed for use with compressed air and nitrogen gas only. Do not use with fluids (gases) other than those stated in the specifications, and do not exceed the specified ranges for pressure or temperature, as this will cause damage, etc.
- *Select a product according to the maximum consumption flow rate. When using compressed air for air blow applications, etc., calculate the maximum volume of air that will be consumed before selecting the SF□ series product size. (Using a product that exceeds the maximum air flow and running excessive compressed air can cause the cleanliness of the compressed air to deteriorate and/or damage the element.)
- *Set the processing flow rate with an initial pressure drop of 0.02 MPa or less. If the initial pressure drop is set too high, the service life will be shorter due to clogging.
- *See the manufacturer’s catalog for product information other than the above.
- *Product pictures are example representations for the product series. Please be aware that actual product specifications may be different.
Basic Information
| Type | Standard | Compressed Air Quality | General Dry Air | Filtration Level | 0.01μm |
|---|---|---|---|---|---|
| Treatment Air Flow Rate(l/min) | 240 | Operating Environment | Clean Room Specifications (Prevent dust) | Drain Cock | No |
| Bowl Material | SUS316 | Bowl Guard | No | Operating Pressure Range(MPa) | null::0.99 |
SFC100-02
SFC100-03
SFC102-02
SFC102-03
SFC105-02
SFC105-03
